A facility for performing SFR and other image evaluation inspections of FCM30S, FCM30W

Features & Specification

Key functions

• - Measure it while inspecting the focus and foreign substance of the product

Features and Advantages

• - Using CL lens, it is available for moving position and adjusting Tx and Ty, and possible to give OC correlation compared to Tilt information of AA.
• - Module Align
  * XY Axis moving distance: ±7.5mm
  * Z Axis moving distance: ±4mm
  * TZ(Rotate) degree : ±5.5’
  * TX,TY degree : ±8’
  * Rotate : 0.004°/Pulse(Full Step)

Specification

• - Tester
  * 1580(W)mm x 1910(D)mm x 2100(H)mm
  * Pass Line : 1250±50mm
• - Handler
  * 1580(W)mm x 800(D)mm x 2100(H)mm
  * Pass Line : 940±50mmCL lens